<?xml version="1.0" encoding="UTF-8"?>

<!--XBRL Document Created with the Workiva Platform-->
<!--Copyright 2026 Workiva-->
<!--r:b0f837b4-502b-4477-aaf5-2bc81dd2f6a1,g:fb3f7e52-02e0-4b63-a1a2-4eed847d0a15-->
<xs:schema xmlns:xs="http://www.w3.org/2001/XMLSchema" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:svco="http://silvaco.com/20251231" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:dtr-types="http://www.xbrl.org/dtr/type/2024-01-31" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" attributeFormDefault="unqualified" elementFormDefault="qualified" targetNamespace="http://silvaco.com/20251231">
  <xs:import namespace="http://fasb.org/srt/2025" schemaLocation="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd"/>
  <xs:import namespace="http://fasb.org/us-gaap/2025" schemaLocation="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd"/>
  <xs:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd"/>
  <xs:import namespace="http://www.xbrl.org/2003/linkbase" schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd"/>
  <xs:import namespace="http://www.xbrl.org/dtr/type/2024-01-31" schemaLocation="https://www.xbrl.org/dtr/type/2024-01-31/types.xsd"/>
  <xs:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd"/>
  <xs:import namespace="http://xbrl.sec.gov/country/2025" schemaLocation="https://xbrl.sec.gov/country/2025/country-2025.xsd"/>
  <xs:import namespace="http://xbrl.sec.gov/cyd-af-sub/2025" schemaLocation="https://xbrl.sec.gov/cyd/2025/cyd-af-sub-2025.xsd"/>
  <xs:import namespace="http://xbrl.sec.gov/dei/2025" schemaLocation="https://xbrl.sec.gov/dei/2025/dei-2025.xsd"/>
  <xs:import namespace="http://xbrl.sec.gov/ecd/2025" schemaLocation="https://xbrl.sec.gov/ecd/2025/ecd-2025.xsd"/>
  <xs:annotation>
    <xs:appinfo>
      <link:linkbaseRef xmlns:xlink="http://www.w3.org/1999/xlink" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="svco-20251231_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:type="simple"/>
      <link:linkbaseRef xmlns:xlink="http://www.w3.org/1999/xlink" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="svco-20251231_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:type="simple"/>
      <link:linkbaseRef xmlns:xlink="http://www.w3.org/1999/xlink" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="svco-20251231_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:type="simple"/>
      <link:linkbaseRef xmlns:xlink="http://www.w3.org/1999/xlink" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="svco-20251231_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:type="simple"/>
      <link:roleType id="Cover" roleURI="http://silvaco.com/role/Cover">
        <link:definition>0000001 - Document - Cover</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AuditInformation" roleURI="http://silvaco.com/role/AuditInformation">
        <link:definition>0000002 - Document - Audit Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CONSOLIDATEDBALANCESHEETS" roleURI="http://silvaco.com/role/CONSOLIDATEDBALANCESHEETS">
        <link:definition>9952151 - Statement - CONSOLIDATED BALANCE SHEETS</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CONSOLIDATEDBALANCESHEETSParenthetical" roleURI="http://silvaco.com/role/CONSOLIDATEDBALANCESHEETSParenthetical">
        <link:definition>9952152 - Statement - CONSOLIDATED BALANCE SHEETS (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CONSOLIDATEDSTATEMENTSOFLOSS" roleURI="http://silvaco.com/role/CONSOLIDATEDSTATEMENTSOFLOSS">
        <link:definition>9952153 - Statement - CONSOLIDATED STATEMENTS OF LOSS</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CONSOLIDATEDSTATEMENTSOFCOMPREHENSIVELOSS" roleURI="http://silvaco.com/role/CONSOLIDATEDSTATEMENTSOFCOMPREHENSIVELOSS">
        <link:definition>9952154 - Statement - CONSOLIDATED STATEMENTS OF COMPREHENSIVE LOSS</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CONSOLIDATEDSTATEMENTSOFSTOCKHOLDERSEQUITY" roleURI="http://silvaco.com/role/CONSOLIDATEDSTATEMENTSOFSTOCKHOLDERSEQUITY">
        <link:definition>9952155 - Statement - CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CONSOLIDATEDSTATEMENTSOFSTOCKHOLDERSEQUITYParenthetical" roleURI="http://silvaco.com/role/CONSOLIDATEDSTATEMENTSOFSTOCKHOLDERSEQUITYParenthetical">
        <link:definition>9952156 - Statement - CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CONSOLIDATEDSTATEMENTSOFCASHFLOWS" roleURI="http://silvaco.com/role/CONSOLIDATEDSTATEMENTSOFCASHFLOWS">
        <link:definition>9952157 - Statement - CONSOLIDATED STATEMENTS OF CASH FLOWS</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DescriptionofBusiness" roleURI="http://silvaco.com/role/DescriptionofBusiness">
        <link:definition>9952158 - Disclosure - Description of Business</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryofSignificantAccountingandReportingPolicies" roleURI="http://silvaco.com/role/SummaryofSignificantAccountingandReportingPolicies">
        <link:definition>9952159 - Disclosure - Summary of Significant Accounting and Reporting Policies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="Revenue" roleURI="http://silvaco.com/role/Revenue">
        <link:definition>9952160 - Disclosure - Revenue</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="Acquisitions" roleURI="http://silvaco.com/role/Acquisitions">
        <link:definition>9952161 - Disclosure - Acquisitions</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="Restructuring" roleURI="http://silvaco.com/role/Restructuring">
        <link:definition>9952162 - Disclosure - Restructuring</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="Leases" roleURI="http://silvaco.com/role/Leases">
        <link:definition>9952163 - Disclosure - Leases</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="PropertyandEquipmentNet" roleURI="http://silvaco.com/role/PropertyandEquipmentNet">
        <link:definition>9952164 - Disclosure - Property and Equipment, Net</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GoodwillandIntangibleAssets" roleURI="http://silvaco.com/role/GoodwillandIntangibleAssets">
        <link:definition>9952165 - Disclosure - Goodwill and Intangible Assets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SignificantBalanceSheetComponents" roleURI="http://silvaco.com/role/SignificantBalanceSheetComponents">
        <link:definition>9952166 - Disclosure - Significant Balance Sheet Components</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RelatedParties" roleURI="http://silvaco.com/role/RelatedParties">
        <link:definition>9952167 - Disclosure - Related Parties</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AccruedExpensesandOtherCurrentLiabilitiesandOtherNonCurrentLiabilities" roleURI="http://silvaco.com/role/AccruedExpensesandOtherCurrentLiabilitiesandOtherNonCurrentLiabilities">
        <link:definition>9952168 - Disclosure - Accrued Expenses and Other Current Liabilities and Other Non-Current Liabilities</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DebtandFinancingObligations" roleURI="http://silvaco.com/role/DebtandFinancingObligations">
        <link:definition>9952169 - Disclosure - Debt and Financing Obligations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockBasedCompensation" roleURI="http://silvaco.com/role/StockBasedCompensation">
        <link:definition>9952170 - Disclosure - Stock-Based Compensation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxes" roleURI="http://silvaco.com/role/IncomeTaxes">
        <link:definition>9952171 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SegmentReportingandGeographicalConcentration" roleURI="http://silvaco.com/role/SegmentReportingandGeographicalConcentration">
        <link:definition>9952172 - Disclosure - Segment Reporting and Geographical Concentration</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CommitmentsandContingencies" roleURI="http://silvaco.com/role/CommitmentsandContingencies">
        <link:definition>9952173 - Disclosure - Commitments and Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DefinedContributionPlan" roleURI="http://silvaco.com/role/DefinedContributionPlan">
        <link:definition>9952174 - Disclosure - Defined Contribution Plan</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="FairValueofFinancialInstruments" roleURI="http://silvaco.com/role/FairValueofFinancialInstruments">
        <link:definition>9952175 - Disclosure - Fair Value of Financial Instruments</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SubsequentEvents" roleURI="http://silvaco.com/role/SubsequentEvents">
        <link:definition>9952176 - Disclosure - Subsequent Events</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryofSignificantAccountingandReportingPoliciesPolicies" roleURI="http://silvaco.com/role/SummaryofSignificantAccountingandReportingPoliciesPolicies">
        <link:definition>9955511 - Disclosure - Summary of Significant Accounting and Reporting Policies (Policies)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryofSignificantAccountingandReportingPoliciesTables" roleURI="http://silvaco.com/role/SummaryofSignificantAccountingandReportingPoliciesTables">
        <link:definition>9955512 - Disclosure - Summary of Significant Accounting and Reporting Policies (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RevenueTables" roleURI="http://silvaco.com/role/RevenueTables">
        <link:definition>9955513 - Disclosure - Revenue (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionsTables" roleURI="http://silvaco.com/role/AcquisitionsTables">
        <link:definition>9955514 - Disclosure - Acquisitions (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RestructuringTables" roleURI="http://silvaco.com/role/RestructuringTables">
        <link:definition>9955515 - Disclosure - Restructuring (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LeasesTables" roleURI="http://silvaco.com/role/LeasesTables">
        <link:definition>9955516 - Disclosure - Leases (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="PropertyandEquipmentNetTables" roleURI="http://silvaco.com/role/PropertyandEquipmentNetTables">
        <link:definition>9955517 - Disclosure - Property and Equipment, Net (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GoodwillandIntangibleAssetsTables" roleURI="http://silvaco.com/role/GoodwillandIntangibleAssetsTables">
        <link:definition>9955518 - Disclosure - Goodwill and Intangible Assets (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SignificantBalanceSheetComponentsTables" roleURI="http://silvaco.com/role/SignificantBalanceSheetComponentsTables">
        <link:definition>9955519 - Disclosure - Significant Balance Sheet Components (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AccruedExpensesandOtherCurrentLiabilitiesandOtherNonCurrentLiabilitiesTables" roleURI="http://silvaco.com/role/AccruedExpensesandOtherCurrentLiabilitiesandOtherNonCurrentLiabilitiesTables">
        <link:definition>9955520 - Disclosure - Accrued Expenses and Other Current Liabilities and Other Non-Current Liabilities (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DebtandFinancingObligationsTables" roleURI="http://silvaco.com/role/DebtandFinancingObligationsTables">
        <link:definition>9955521 - Disclosure - Debt and Financing Obligations (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockBasedCompensationTables" roleURI="http://silvaco.com/role/StockBasedCompensationTables">
        <link:definition>9955522 - Disclosure - Stock-Based Compensation (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesTables" roleURI="http://silvaco.com/role/IncomeTaxesTables">
        <link:definition>9955523 - Disclosure - Income Taxes (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SegmentReportingandGeographicalConcentrationTables" roleURI="http://silvaco.com/role/SegmentReportingandGeographicalConcentrationTables">
        <link:definition>9955524 - Disclosure - Segment Reporting and Geographical Concentration (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="FairValueofFinancialInstrumentsTables" roleURI="http://silvaco.com/role/FairValueofFinancialInstrumentsTables">
        <link:definition>9955525 - Disclosure - Fair Value of Financial Instruments (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DescriptionofBusinessDetails" roleURI="http://silvaco.com/role/DescriptionofBusinessDetails">
        <link:definition>9955526 - Disclosure - Description of Business (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryofSignificantAccountingandReportingPoliciesNarrativeDetails" roleURI="http://silvaco.com/role/SummaryofSignificantAccountingandReportingPoliciesNarrativeDetails">
        <link:definition>9955527 - Disclosure - Summary of Significant Accounting and Reporting Policies - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryofSignificantAccountingandReportingPoliciesScheduleofPropertyPlantandEquipmentDetails" roleURI="http://silvaco.com/role/SummaryofSignificantAccountingandReportingPoliciesScheduleofPropertyPlantandEquipmentDetails">
        <link:definition>9955528 - Disclosure - Summary of Significant Accounting and Reporting Policies - Schedule of Property, Plant and Equipment (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryofSignificantAccountingandReportingPoliciesSchedulesofConcentrationofRiskbyRiskFactorDetails" roleURI="http://silvaco.com/role/SummaryofSignificantAccountingandReportingPoliciesSchedulesofConcentrationofRiskbyRiskFactorDetails">
        <link:definition>9955529 - Disclosure - Summary of Significant Accounting and Reporting Policies - Schedules of Concentration of Risk, by Risk Factor (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryofSignificantAccountingandReportingPoliciesScheduleofAccountsReceivableAllowanceforCreditLossDetails" roleURI="http://silvaco.com/role/SummaryofSignificantAccountingandReportingPoliciesScheduleofAccountsReceivableAllowanceforCreditLossDetails">
        <link:definition>9955530 - Disclosure - Summary of Significant Accounting and Reporting Policies - Schedule of Accounts Receivable, Allowance for Credit Loss (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryofSignificantAccountingandReportingPoliciesScheduleofAntidilutiveSecuritiesExcludedfromComputationofEarningsPerShareDetails" roleURI="http://silvaco.com/role/SummaryofSignificantAccountingandReportingPoliciesScheduleofAntidilutiveSecuritiesExcludedfromComputationofEarningsPerShareDetails">
        <link:definition>9955531 - Disclosure - Summary of Significant Accounting and Reporting Policies - Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RevenueScheduleofContractwithCustomerContractAssetContractLiabilityandReceivableDetails" roleURI="http://silvaco.com/role/RevenueScheduleofContractwithCustomerContractAssetContractLiabilityandReceivableDetails">
        <link:definition>9955532 - Disclosure - Revenue - Schedule of Contract with Customer, Contract Asset, Contract Liability, and Receivable (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RevenueNarrativeDetails" roleURI="http://silvaco.com/role/RevenueNarrativeDetails">
        <link:definition>9955533 - Disclosure - Revenue - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RevenueNarrativeDetails_1" roleURI="http://silvaco.com/role/RevenueNarrativeDetails_1">
        <link:definition>9955533 - Disclosure - Revenue - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionsNarrativeDetails" roleURI="http://silvaco.com/role/AcquisitionsNarrativeDetails">
        <link:definition>9955534 - Disclosure - Acquisitions - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionsAssetsAcquiredandLiabilitiesAssumedOpticalProximityCorrectionSuiteofToolsDetails" roleURI="http://silvaco.com/role/AcquisitionsAssetsAcquiredandLiabilitiesAssumedOpticalProximityCorrectionSuiteofToolsDetails">
        <link:definition>9955535 - Disclosure - Acquisitions - Assets Acquired and Liabilities Assumed - Optical Proximity Correction Suite of Tools (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionsOperatingResultsDetails" roleURI="http://silvaco.com/role/AcquisitionsOperatingResultsDetails">
        <link:definition>9955536 - Disclosure - Acquisitions - Operating Results (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionsAssetsAcquiredAndLiabilitiesAssumedTechXCorporationDetails" roleURI="http://silvaco.com/role/AcquisitionsAssetsAcquiredAndLiabilitiesAssumedTechXCorporationDetails">
        <link:definition>9955537 - Disclosure - Acquisitions - Assets Acquired And Liabilities Assumed - Tech-X Corporation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionsAssetsAcquiredAndLiabilitiesAssumedMixelGroupIncDetails" roleURI="http://silvaco.com/role/AcquisitionsAssetsAcquiredAndLiabilitiesAssumedMixelGroupIncDetails">
        <link:definition>9955538 - Disclosure - Acquisitions - Assets Acquired And Liabilities Assumed - Mixel Group, Inc. (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RestructuringNarrativeDetails" roleURI="http://silvaco.com/role/RestructuringNarrativeDetails">
        <link:definition>9955539 - Disclosure - Restructuring - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RestructuringScheduleofRestructuringExpensesDetails" roleURI="http://silvaco.com/role/RestructuringScheduleofRestructuringExpensesDetails">
        <link:definition>9955540 - Disclosure - Restructuring - Schedule of Restructuring Expenses (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LeasesLeaseCostDetails" roleURI="http://silvaco.com/role/LeasesLeaseCostDetails">
        <link:definition>9955541 - Disclosure - Leases - Lease Cost (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LeasesAdditionalInformationRelatedtoOperatingLeasesDetails" roleURI="http://silvaco.com/role/LeasesAdditionalInformationRelatedtoOperatingLeasesDetails">
        <link:definition>9955542 - Disclosure - Leases - Additional Information Related to Operating Leases (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LeasesScheduleofOperatingLeaseMaturityDetails" roleURI="http://silvaco.com/role/LeasesScheduleofOperatingLeaseMaturityDetails">
        <link:definition>9955543 - Disclosure - Leases - Schedule of Operating Lease Maturity (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LeasesScheduleofOperatingLeaseMaturityDetails_1" roleURI="http://silvaco.com/role/LeasesScheduleofOperatingLeaseMaturityDetails_1">
        <link:definition>9955543 - Disclosure - Leases - Schedule of Operating Lease Maturity (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LeasesNarrativeDetails" roleURI="http://silvaco.com/role/LeasesNarrativeDetails">
        <link:definition>9955544 - Disclosure - Leases - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="PropertyandEquipmentNetScheduleOfPropertyandEquipmentNetDetails" roleURI="http://silvaco.com/role/PropertyandEquipmentNetScheduleOfPropertyandEquipmentNetDetails">
        <link:definition>9955545 - Disclosure - Property and Equipment, Net - Schedule Of Property and Equipment, Net (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="PropertyandEquipmentNetNarrativeDetails" roleURI="http://silvaco.com/role/PropertyandEquipmentNetNarrativeDetails">
        <link:definition>9955546 - Disclosure - Property and Equipment, Net - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GoodwillandIntangibleAssetsNarrativeDetails" roleURI="http://silvaco.com/role/GoodwillandIntangibleAssetsNarrativeDetails">
        <link:definition>9955547 - Disclosure - Goodwill and Intangible Assets - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GoodwillandIntangibleAssetsScheduleofFiniteLivedIntangibleAssetsDetails" roleURI="http://silvaco.com/role/GoodwillandIntangibleAssetsScheduleofFiniteLivedIntangibleAssetsDetails">
        <link:definition>9955548 - Disclosure - Goodwill and Intangible Assets - Schedule of Finite-Lived Intangible Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GoodwillandIntangibleAssetsScheduleofAmortizationExpenseDetails" roleURI="http://silvaco.com/role/GoodwillandIntangibleAssetsScheduleofAmortizationExpenseDetails">
        <link:definition>9955549 - Disclosure - Goodwill and Intangible Assets - Schedule of Amortization Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GoodwillandIntangibleAssetsScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseDetails" roleURI="http://silvaco.com/role/GoodwillandIntangibleAssetsScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseDetails">
        <link:definition>9955550 - Disclosure - Goodwill and Intangible Assets - Schedule of Finite-Lived Intangible Assets, Future Amortization Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SignificantBalanceSheetComponentsPrepaidExpenseAndOtherCurrentAssetsAndOtherAssetsDetails" roleURI="http://silvaco.com/role/SignificantBalanceSheetComponentsPrepaidExpenseAndOtherCurrentAssetsAndOtherAssetsDetails">
        <link:definition>9955551 - Disclosure - Significant Balance Sheet Components - Prepaid Expense And Other Current Assets And Other Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RelatedPartiesDetails" roleURI="http://silvaco.com/role/RelatedPartiesDetails">
        <link:definition>9955552 - Disclosure - Related Parties (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AccruedExpensesandOtherCurrentLiabilitiesandOtherNonCurrentLiabilitiesScheduleofAccruedExpensesandOtherCurrentLiabilitiesDetails" roleURI="http://silvaco.com/role/AccruedExpensesandOtherCurrentLiabilitiesandOtherNonCurrentLiabilitiesScheduleofAccruedExpensesandOtherCurrentLiabilitiesDetails">
        <link:definition>9955553 - Disclosure - Accrued Expenses and Other Current Liabilities and Other Non-Current Liabilities - Schedule of Accrued Expenses and Other Current Liabilities (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DebtandFinancingObligationsNarrativeDetails" roleURI="http://silvaco.com/role/DebtandFinancingObligationsNarrativeDetails">
        <link:definition>9955554 - Disclosure - Debt and Financing Obligations - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DebtandFinancingObligationsScheduleofContractualObligationFiscalYearMaturityDetails" roleURI="http://silvaco.com/role/DebtandFinancingObligationsScheduleofContractualObligationFiscalYearMaturityDetails">
        <link:definition>9955555 - Disclosure - Debt and Financing Obligations - Schedule of Contractual Obligation, Fiscal Year Maturity (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockBasedCompensationNarrativeDetails" roleURI="http://silvaco.com/role/StockBasedCompensationNarrativeDetails">
        <link:definition>9955556 - Disclosure - Stock-Based Compensation - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockBasedCompensationRSUActivityDetails" roleURI="http://silvaco.com/role/StockBasedCompensationRSUActivityDetails">
        <link:definition>9955557 - Disclosure - Stock-Based Compensation - RSU Activity (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockBasedCompensationEmployeeStockPurchasePlanESPPDetails" roleURI="http://silvaco.com/role/StockBasedCompensationEmployeeStockPurchasePlanESPPDetails">
        <link:definition>9955558 - Disclosure - Stock-Based Compensation - Employee Stock Purchase Plan (ESPP) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockBasedCompensationWeightedAverageAssumptionsDetails" roleURI="http://silvaco.com/role/StockBasedCompensationWeightedAverageAssumptionsDetails">
        <link:definition>9955559 - Disclosure - Stock-Based Compensation - Weighted Average Assumptions (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockBasedCompensationStockBasedCompensationExpenseDetails" roleURI="http://silvaco.com/role/StockBasedCompensationStockBasedCompensationExpenseDetails">
        <link:definition>9955560 - Disclosure - Stock-Based Compensation - Stock-Based Compensation Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesScheduleofDomesticandForeignComponentsofLossBeforeIncomeTaxProvisionsDetails" roleURI="http://silvaco.com/role/IncomeTaxesScheduleofDomesticandForeignComponentsofLossBeforeIncomeTaxProvisionsDetails">
        <link:definition>9955561 - Disclosure - Income Taxes - Schedule of Domestic and Foreign Components of Loss Before Income Tax Provisions (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesScheduleofComponentsofIncomeTaxBenefitProvisionDetails" roleURI="http://silvaco.com/role/IncomeTaxesScheduleofComponentsofIncomeTaxBenefitProvisionDetails">
        <link:definition>9955562 - Disclosure - Income Taxes - Schedule of Components of Income Tax (Benefit) Provision (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesScheduleofDeferredTaxAssetsandLiabilitiesDetails" roleURI="http://silvaco.com/role/IncomeTaxesScheduleofDeferredTaxAssetsandLiabilitiesDetails">
        <link:definition>9955563 - Disclosure - Income Taxes - Schedule of Deferred Tax Assets and Liabilities (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesScheduleofReconciliationofFederalStatutoryIncomeTaxRatetoEffectiveIncomeTaxRateDetails" roleURI="http://silvaco.com/role/IncomeTaxesScheduleofReconciliationofFederalStatutoryIncomeTaxRatetoEffectiveIncomeTaxRateDetails">
        <link:definition>9955564 - Disclosure - Income Taxes - Schedule of Reconciliation of Federal Statutory Income Tax Rate to Effective Income Tax Rate (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesScheduleofIncomeTaxesPaidNetofRefundsDetails" roleURI="http://silvaco.com/role/IncomeTaxesScheduleofIncomeTaxesPaidNetofRefundsDetails">
        <link:definition>9955565 - Disclosure - Income Taxes - Schedule of Income Taxes Paid, Net of Refunds (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesNarrativeDetails" roleURI="http://silvaco.com/role/IncomeTaxesNarrativeDetails">
        <link:definition>9955566 - Disclosure - Income Taxes - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesScheduleofUnrecognizedTaxBenefitsRollForwardDetails" roleURI="http://silvaco.com/role/IncomeTaxesScheduleofUnrecognizedTaxBenefitsRollForwardDetails">
        <link:definition>9955567 - Disclosure - Income Taxes - Schedule of Unrecognized Tax Benefits Roll Forward (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SegmentReportingandGeographicalConcentrationNarrativeDetails" roleURI="http://silvaco.com/role/SegmentReportingandGeographicalConcentrationNarrativeDetails">
        <link:definition>9955568 - Disclosure - Segment Reporting and Geographical Concentration - Narrative (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SegmentReportingandGeographicalConcentrationReconciliationOfRevenuePayrollAndOtherExpensesDetails" roleURI="http://silvaco.com/role/SegmentReportingandGeographicalConcentrationReconciliationOfRevenuePayrollAndOtherExpensesDetails">
        <link:definition>9955569 - Disclosure - Segment Reporting and Geographical Concentration - Reconciliation Of Revenue, Payroll, And Other Expenses (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SegmentReportingandGeographicalConcentrationRevenuesAndPropertyAndEquipmentByGeographicalAreaDetails" roleURI="http://silvaco.com/role/SegmentReportingandGeographicalConcentrationRevenuesAndPropertyAndEquipmentByGeographicalAreaDetails">
        <link:definition>9955570 - Disclosure - Segment Reporting and Geographical Concentration - Revenues And Property And Equipment By Geographical Area (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CommitmentsandContingenciesDetails" roleURI="http://silvaco.com/role/CommitmentsandContingenciesDetails">
        <link:definition>9955571 - Disclosure - Commitments and Contingencies (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DefinedContributionPlanDetails" roleURI="http://silvaco.com/role/DefinedContributionPlanDetails">
        <link:definition>9955572 - Disclosure - Defined Contribution Plan (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="FairValueofFinancialInstrumentsScheduleofFairValueLiabilitiesMeasuredonRecurringBasisDetails" roleURI="http://silvaco.com/role/FairValueofFinancialInstrumentsScheduleofFairValueLiabilitiesMeasuredonRecurringBasisDetails">
        <link:definition>9955573 - Disclosure - Fair Value of Financial Instruments - Schedule of Fair Value, Liabilities Measured on Recurring Basis (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="FairValueofFinancialInstrumentsScheduleofFairValueLiabilitiesMeasuredonRecurringBasisUnobservableInputReconciliationDetails" roleURI="http://silvaco.com/role/FairValueofFinancialInstrumentsScheduleofFairValueLiabilitiesMeasuredonRecurringBasisUnobservableInputReconciliationDetails">
        <link:definition>9955574 - Disclosure - Fair Value of Financial Instruments - Schedule of Fair Value, Liabilities Measured on Recurring Basis, Unobservable Input Reconciliation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SubsequentEventsDetails" roleURI="http://silvaco.com/role/SubsequentEventsDetails">
        <link:definition>9955575 - Disclosure - Subsequent Events (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
    </xs:appinfo>
  </xs:annotation>
  <xs:element id="svco_AuditInformationAbstract" abstract="true" name="AuditInformationAbstract" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="svco_SoftwareMaintenanceAndServiceMember" abstract="true" name="SoftwareMaintenanceAndServiceMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_AccountsReceivableCreditLossExpenseReversalIncludingRecovery" abstract="false" name="AccountsReceivableCreditLossExpenseReversalIncludingRecovery" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_DeferredOfferingCostsPolicyPolicyTextBlock" abstract="false" name="DeferredOfferingCostsPolicyPolicyTextBlock" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:textBlockItemType"/>
  <xs:element id="svco_SaleOfStockConsiderationReceivedOnTransactionIncludingStockIssuanceCosts" abstract="false" name="SaleOfStockConsiderationReceivedOnTransactionIncludingStockIssuanceCosts" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_AccountingPoliciesTable" abstract="true" name="AccountingPoliciesTable" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType"/>
  <xs:element id="svco_FinancialInstutionAxis" abstract="true" name="FinancialInstutionAxis" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrldt:dimensionItem" type="xbrli:stringItemType"/>
  <xs:element id="svco_FinancialInstutionDomain" abstract="true" name="FinancialInstutionDomain" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_OneFinancialInstitutionMember" abstract="true" name="OneFinancialInstitutionMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_CashCashEquivalentRestrictedCashAndRestrictedCashEquivalentMember" abstract="true" name="CashCashEquivalentRestrictedCashAndRestrictedCashEquivalentMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_FinancialInstitutionRiskMember" abstract="true" name="FinancialInstitutionRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_ForeignSubsidiariesMember" abstract="true" name="ForeignSubsidiariesMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_AccountingPoliciesLineItems" abstract="true" name="AccountingPoliciesLineItems" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="svco_CustomerAMember" abstract="true" name="CustomerAMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_CustomerBMember" abstract="true" name="CustomerBMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_CustomerCMember" abstract="true" name="CustomerCMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_CustomerDMember" abstract="true" name="CustomerDMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_CustomerEMember" abstract="true" name="CustomerEMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_ContingentlyIssuableShareMember" abstract="true" name="ContingentlyIssuableShareMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_ContractWithCustomerLiabilityPercentageExpectedToBeRecognizedWithinNextTwelveMonths" abstract="false" name="ContractWithCustomerLiabilityPercentageExpectedToBeRecognizedWithinNextTwelveMonths" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="svco_OpticalProximityCorrectionSuiteOfToolsOPCBusinessMember" abstract="true" name="OpticalProximityCorrectionSuiteOfToolsOPCBusinessMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_TechXCorporationTechXMember" abstract="true" name="TechXCorporationTechXMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_MixelGroupInc.MixelMember" abstract="true" name="MixelGroupInc.MixelMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_BusinessCombinationContingentConsiderationMaximumPayout" abstract="false" name="BusinessCombinationContingentConsiderationMaximumPayout" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_BusinessCombinationRecognizedAssetAcquiredContractWithCustomer" abstract="false" name="BusinessCombinationRecognizedAssetAcquiredContractWithCustomer" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_BusinessCombinationRecognizedAssetAcquiredOperatingLeaseRightOfUseAssetsNet" abstract="false" name="BusinessCombinationRecognizedAssetAcquiredOperatingLeaseRightOfUseAssetsNet" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_BusinessCombinationRecognizedLiabilityAssumedLeaseObligationCurrent" abstract="false" name="BusinessCombinationRecognizedLiabilityAssumedLeaseObligationCurrent" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_BusinessCombinationRecognizedLiabilityAssumedLeaseObligationNoncurrent" abstract="false" name="BusinessCombinationRecognizedLiabilityAssumedLeaseObligationNoncurrent" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_LongLivedTangibleAssetRetiredFullyDepreciated" abstract="false" name="LongLivedTangibleAssetRetiredFullyDepreciated" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_DepreciatedIntangibleAssetsMember" abstract="true" name="DepreciatedIntangibleAssetsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_FiniteLivedIntangibleAssetTotalCashConsiderationToBePaid" abstract="false" name="FiniteLivedIntangibleAssetTotalCashConsiderationToBePaid" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_FiniteLivedIntangibleAssetConsiderationPaymentPeriod" abstract="false" name="FiniteLivedIntangibleAssetConsiderationPaymentPeriod" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="svco_FiniteLivedIntangibleAssetsFullyAmortized" abstract="false" name="FiniteLivedIntangibleAssetsFullyAmortized" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_PrepaidSoftwareAndSubscriptionsCurrent" abstract="false" name="PrepaidSoftwareAndSubscriptionsCurrent" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_KipeeMember" abstract="true" name="KipeeMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_NewHorizonsCambridgeLTDAndNewHorizonsFranceMember" abstract="true" name="NewHorizonsCambridgeLTDAndNewHorizonsFranceMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_NewHorizonsCambridgeLTDMember" abstract="true" name="NewHorizonsCambridgeLTDMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_NewHorizonsFranceMember" abstract="true" name="NewHorizonsFranceMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_A2022CreditLineMember" abstract="true" name="A2022CreditLineMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_LoanMember" abstract="true" name="LoanMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_NangatePartiesCrossComplaintMember" abstract="true" name="NangatePartiesCrossComplaintMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_SilvacoGroupInc.AndCoDefendantsMember" abstract="true" name="SilvacoGroupInc.AndCoDefendantsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_CoDefendantsMember" abstract="true" name="CoDefendantsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_DebtInstrumentCollateralBuildingNumberOfSquareFeet" abstract="false" name="DebtInstrumentCollateralBuildingNumberOfSquareFeet" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:areaItemType"/>
  <xs:element id="svco_LegalSettlementApportionmentAgreementPercentageOfSettlementPaymentAgreedToBear" abstract="false" name="LegalSettlementApportionmentAgreementPercentageOfSettlementPaymentAgreedToBear" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="svco_AccruedOperatingExpenseCurrent" abstract="false" name="AccruedOperatingExpenseCurrent" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_EastWestBankLoanMember" abstract="true" name="EastWestBankLoanMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_MicronTechnologyInc.MicronMember" abstract="true" name="MicronTechnologyInc.MicronMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_DebtInstrumentConvertibleTermsOfConversionAxis" abstract="true" name="DebtInstrumentConvertibleTermsOfConversionAxis" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrldt:dimensionItem" type="xbrli:stringItemType"/>
  <xs:element id="svco_DebtInstrumentConvertibleTermsOfConversionDomain" abstract="true" name="DebtInstrumentConvertibleTermsOfConversionDomain" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_DebtConversionTermsOneMember" abstract="true" name="DebtConversionTermsOneMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_SupplierFinanceProgramObligationImputedInterestRate" abstract="false" name="SupplierFinanceProgramObligationImputedInterestRate" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="svco_InterestExpenseSupplierFinanceObligation" abstract="false" name="InterestExpenseSupplierFinanceObligation" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_DebtInstrumentConvertibleConversionPriceMultiplier" abstract="false" name="DebtInstrumentConvertibleConversionPriceMultiplier" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:pureItemType"/>
  <xs:element id="svco_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumerationNotDisclosedFlag" abstract="false" name="DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumerationNotDisclosedFlag" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="svco_ContractualObligationImputedInterest" abstract="false" name="ContractualObligationImputedInterest" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_RestrictedStockUnitsRSUsRefreshMember" abstract="true" name="RestrictedStockUnitsRSUsRefreshMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_RestrictedStockUnitsRSUsLiquidityEventBasedMember" abstract="true" name="RestrictedStockUnitsRSUsLiquidityEventBasedMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_RestrictedStockUnitsRSUsTimeBasedMember" abstract="true" name="RestrictedStockUnitsRSUsTimeBasedMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_RestrictedStockUnitsRSUsPerformanceBasedAndTimeBasedMember" abstract="true" name="RestrictedStockUnitsRSUsPerformanceBasedAndTimeBasedMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_RestrictedStockUnitsRSUsMarketBasedLiquidityEventBasedAndTimeBasedMember" abstract="true" name="RestrictedStockUnitsRSUsMarketBasedLiquidityEventBasedAndTimeBasedMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_ShareBasedCompensationArrangementByShareBasedPaymentAwardPurchasePeriod" abstract="false" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardPurchasePeriod" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="svco_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfVestingRequirements" abstract="false" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfVestingRequirements" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:integerItemType"/>
  <xs:element id="svco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantedInPeriodFairValue" abstract="false" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantedInPeriodFairValue" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsVolumeWeightedAveragePrice" abstract="false" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsVolumeWeightedAveragePrice" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="dtr-types:perShareItemType"/>
  <xs:element id="svco_DeferredCompensationArrangementWithIndividualSharesRequiredToIssuedIfFinalized" abstract="false" name="DeferredCompensationArrangementWithIndividualSharesRequiredToIssuedIfFinalized" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="xbrli:sharesItemType"/>
  <xs:element id="svco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageRemainingContractualTerms" abstract="false" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageRemainingContractualTerms" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="svco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageRemainingContractualTerms" abstract="false" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageRemainingContractualTerms" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="svco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresInPeriodWeightedAverageRemainingContractualTerms" abstract="false" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresInPeriodWeightedAverageRemainingContractualTerms" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="svco_DeferredTaxAssetsPropertyPlantAndEquipmentAndIntangibleAssets" abstract="false" name="DeferredTaxAssetsPropertyPlantAndEquipmentAndIntangibleAssets" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_DeferredTaxLiabilitiesDepreciableAndAmortizableAssets" abstract="false" name="DeferredTaxLiabilitiesDepreciableAndAmortizableAssets" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCompensationAmount" abstract="false" name="EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCompensationAmount" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedPaymentArrangementDeficiencyAmount" abstract="false" name="EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedPaymentArrangementDeficiencyAmount" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseTransactionCostsAmount" abstract="false" name="EffectiveIncomeTaxRateReconciliationNondeductibleExpenseTransactionCostsAmount" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCompensationPercent" abstract="false" name="EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCompensationPercent" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="svco_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedPaymentArrangementDeficiencyPercent" abstract="false" name="EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedPaymentArrangementDeficiencyPercent" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="svco_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseTransactionCostsPercent" abstract="false" name="EffectiveIncomeTaxRateReconciliationNondeductibleExpenseTransactionCostsPercent" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:pureItemType"/>
  <xs:element id="svco_IncomeTaxPaidFederalStateAndLocalAfterRefundReceived" abstract="false" name="IncomeTaxPaidFederalStateAndLocalAfterRefundReceived" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="svco_ReportableSegmentMember" abstract="true" name="ReportableSegmentMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_AllOtherCountriesMember" abstract="true" name="AllOtherCountriesMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_SoftwareLicensesMember" abstract="true" name="SoftwareLicensesMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_OtherToolsMember" abstract="true" name="OtherToolsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_AldiniSecondAmendedComplaintMember" abstract="true" name="AldiniSecondAmendedComplaintMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_FraudDamagesExcludingPunitiveDamagesMember" abstract="true" name="FraudDamagesExcludingPunitiveDamagesMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_PunitiveDamagesMember" abstract="true" name="PunitiveDamagesMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_SilvacoGroupInc.Member" abstract="true" name="SilvacoGroupInc.Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="svco_StandardProductWarrantyTerm" abstract="false" name="StandardProductWarrantyTerm" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
</xs:schema>
